Zhangjiagang Prurun Semiconductor Equipment Co., Ltd
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FBR series heater
The FBR series of water jacket heaters for gas filter baking is a groundbreaking new baking heater that uses 200 ℃ high temperature baking filters. Th
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Gas filter water jacket heater

The FBR series of water jacket heaters for gas filter baking is a groundbreaking new baking heater that uses 200 ℃ high temperature baking filters.

The FBR series can be easily installed and removed.

Can be baked at a high temperature of 200 ℃.

The controller unit has interlocking function to prevent overheating and disconnection detection function, making it safe and reliable..

● It is easy to set temperature, time, etc. through a digital controller that can be remotely controlled, making the operation simple..

The heater unit has a lightweight and compact appearance, and does not take up space.

If the metal surface or components inside the filter absorb moisture from the atmosphere, N2 purification alone is almost impossible to completely remove it. Moreover, if H2O and O2 are present in the gas medium, they will react with the moisture in the room temperature environment, causing pollution and corrosion caused by the reaction products inside the filter and process chamber. Therefore, the most effective way to remove water absorption and other degassing components is to bake at temperatures above 200 ℃. PURERON JAPAN has developed a groundbreaking new baking system that can perform 200 ℃ high-temperature baking on filters, achieving a degassing amount (water content) of 1.2ppb in APIMS measurements.

Specifications:

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